Air Liquide Japan Ltd. said Monday it has developed a compact fluorine gas generator for use in manufacturing semiconductor chips and liquid crystals.
The new generator, jointly developed with Toyo Tanso Co., an Osaka-based high-technology maker of graphite-based goods, is more compact than conventional generators, allowing it to be installed inside makers’ factories and freeing them from the need to transport fluorine from large factories specializing in its manufacture.
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